Bibliography on Cleaning Cleanrooms


  • D. M. Carlberg, Cleanroom Microbiology for the Non-Microbiologist, Interpharm, Buffalo Grove, IL, 1995.
  • K. L. Mittal, ed., Particles on Surfaces, 1: Detection, Adhesion, and Removal, Plenum, New York, NY, 1988.
  • K. L. Mittal, ed., Particles on Surfaces: Detection, Adhesion, and Removal, Marcel Dekker, New York, NY, 1995. (Wholly different from the 1988 Mittal book, despite the title.)
  • D. L. Tolliver, ed., Handbook of Contamination Control in Microelectronics: Principles,Applications, and Technology, Noyes, Park Ridge, NJ, 1988.
  • W. Whyte, ed., Cleanroom Design, Wiley, New York, NY, 1991.


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